Substrate Material: |
Soda Lime Glass, Clear Glass Substrate |
Thickness: |
1.50,+/-0.05mm |
Out Dimension: |
23.0 x 23.0,+/-0.1mm |
Pattern Area: |
23.0 x 23.0mm full area, concentric; Chrome-on-glass design |
Pattern Design: |
Square shape with concentric positions; 8 squares |
Square Sizes: |
1,000um;2,000um;3,000um;4,000um;
5,000um;10,000um;15,000um;20,000um (tolerance +/-1um) |
Pattern Tolerance: |
Within +/-1um |
Effective Area: |
Not less than 21.0x21.0mm, as effective pattern view area |
Chrome Coating: |
First-surface,low-reflectivity.OD>3 (reflectivity 10% +/-5% @ 550nm) |
Surface Quality: |
40-20 scratch and dig |
Surface Flatness: |
< Lambda/4 @ 632.8nm over surface, per imaging optics standard |
Back Surface: |
Polished/clear surface |
Edge Surfaces: |
Ground |
Chamfer: |
Chamfer: 0.3mmx45deg typical | |