Substrate Material: |
Soda Lime Glass, Clear Glass Substrate |
Substrate Thickness: |
Standard thickness 4.8+/-0.1mm (back surface polished version) |
Target Dimension: |
250.0x250.0, -0.2/+0.0mm (outer dimension) |
Pattern Area: |
> 240.0x240.0mm central/symmetric area; Chrome-on-glass on-top-surface design |
Pattern Design: |
61x61 grid, with dot design of total 3721 dots |
Dot Diameter: |
2,000um (tolerance +/-0.5um) |
Dot-Dot Pitch Size: |
Center-to-center distance: 4,000um (tolerance +/-0.5um) |
Chrome Coating: |
First-surface,low-reflectivity.OD>3 (reflectivity 10% +/-5% @ 550nm) |
Surface Quality: |
40-20 scratch and dig |
Surface Flatness: |
< Lambda/4 @ 632.8nm over 25mm area, per imaging optics standard |
Overall Pattern Accuracy: |
+/-1um(on-jig tested with surface profile secured) |
Edge Surface/Chamfer: |
Cleaved/protection chamfer <0.15mx45deg |
Back Surface: |
Polished/clear surface; (ground back surface can be processed upon customer's special request. Additional charges apply) |