Substrate Material: |
Soda Lime Glass, Clear Glass Substrate |
Substrate Thickness: |
1.50,+/-0.05mm |
Out Dimension: |
23.0x23.0, +/-0.2mm |
Pattern Area: |
23.0x23.0mm, concentric; Chrome-on-glass design |
Pattern Design: |
Square shape with concentric positions; 8 squares |
Square sizes: |
1,000um;2,000um;3,000um;4,000um;
5,000um;10,000um;15,000um;20,000um (tolerance +/-1um) |
Pattern Tolerance: |
Within +/-1um |
Effective Area: |
21.0x21.0mm, as effective pattern view area |
Chrome Coating: |
First-surface,low-reflectivity.OD>3 (reflectivity 10% +/-5% @ 550nm) |
Surface Quality: |
40-20 scratch and dig |
Surface Flatness: |
< Lambda/4 @ 632.8nm over 25mm area, per imaging optics standard |
Edge Surface/Chamfer: |
Polished; Chamfer <0.3mmx45deg | |