Location: Main >
Photomask Reticle > Photomask Reticle Blanks > PBSL-5009
|
|
Name: | 5-inch Soda-lime Glass Photomask Blank(SL5009) |
P/N: | PBSL-5009 | Keywords: | Soda Lime Photomask Blank,5-inch/T2.3mm,MOQ10pcs |
Unit Price: |
S$250.00/pc
|
Available: |
Call us
|
Request: |
Add to Request List |
Introduction: | Photomask blank is a semi-grade glass substrate coated with Chrome layer and Photoresist layer, used for photolithography. Etchable in all conventional Wet Etch systems. Plasma Grade recommended for Dry Etching systems. |
|
|
|
Substrate: |
Soda Lime Glass |
Outer Dimension: |
5"x5" |
Thickness: |
2.3mm(0.09") |
Surface Polish: |
Double sizes fine polished, inspected to be free of glass defects >2um |
Chrome Coating: |
Vacuum deposited, DC sputtering in class 100 environment |
Chorme Thickness: |
Standard 120nm, OD=3.0@430nm (may customize thickness upto 5um) |
Reflectivity: |
Low: <12% @400nm |
Photoresist: |
Shipley 1800 or AZ1500 filtered to 0.2um at point of use, all widely used positive and negative optical and E-beam resist available. |
MOQ: |
MOQ10pcs per order; 10pcs/cassette(vacuum packed) | |
|