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Photomask Reticle > Photomask Reticle Blanks > PBSL-6012
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Name: | 6-inch Soda-lime Glass Photomask Blank(SL6012) |
P/N: | PBSL-6012 | Keywords: | Soda Lime Photomask Blank,6-inch/T3.0mm,MOQ10pcs |
Unit Price: |
S$310.00/pc
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Available: |
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Request: |
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Introduction: | Photomask blank is a semi-grade glass substrate coated with Chrome layer and Photoresist layer, used for photolithography. Etchable in all conventional Wet Etch systems. Plasma Grade recommended for Dry Etching systems. |
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Substrate: |
Soda Lime Glass |
Outer Dimension: |
6"x6" |
Thickness: |
3.0mm(0.12") |
Surface: |
Double sizes fine polished, inspected to be free of glass defects >2um |
Chrome Coating: |
Vacuum deposited, DC sputtering in class 100 environment |
Chorme Thickness: |
Standard 120nm, OD=3.0@430nm (may customize thickness upto 5um) |
Reflectivity: |
Low: <12% @400nm |
Photoresist: |
Shipley 1800 or AZ1500 filtered to 0.2um at point of use, all widely used positive and negative optical and E-beam resist available. |
Packing: |
10pcs per cassette; MOQ 10pcs; Vacuum packed | |
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