Substrate Material: |
Soda Lime Glass, Clear Glass Substrate |
Substrate Thickness: |
Standard thickness 2.3+/-0.1mm (back surface polished version)
2.2mm (+/-0.1mm) after pack surface ground process; |
Target Dimension: |
10.0x10.0, -0.1/+0.0mm |
Pattern Area: |
5.0x5.0mm central/symmetric area; Chrome-on-glass design |
Pattern Design: |
5x5 grid, with dot design of total 25 dots |
Dot Diameter: |
500um (tolerance +/-0.5um) |
Dot-Dot Pitch Size: |
Center-to-center distance 1000um (tolerance +/-0.5um) |
Chrome Coating: |
First-surface,low-reflectivity.OD>3 (reflectivity 10% +/-5% @ 550nm) |
Surface Quality: |
40-20 scratch and dig |
Surface Flatness: |
< Lambda/4 @ 632.8nm over 25mm area, per imaging optics standard |
Overall Pattern Accuracy: |
+/-1um |
Edge Surface/Chamfer: |
Cleaved/protection chamfer <0.15mx45deg |
Back Surface: |
Polished/clear surface; (or ground surface processed upon customer' special request. Additional charges apply) |