| Substrate Material: |
Soda Lime Glass, Clear Glass Substrate |
| Substrate Thickness: |
1.50,+/-0.05mm |
| Out Dimension: |
72.0x22.0, +/-0.2mm |
| Pattern Area: |
as drawing |
| Pattern Design: |
as drawing(6 key targets included); 2-micron smallest patterns |
| Dot size: |
as drawing(smallest with 10-micron in diameter) |
| Pattern Tolerance: |
Within +/-0.5um |
| Effective Area: |
70x20mm, as effective pattern view area |
| Chrome Coating: |
First-surface,low-reflectivity.OD>3 (reflectivity 10% +/-5% @ 550nm) |
| Surface Quality: |
40-20 scratch and dig |
| Surface Flatness: |
< Lambda/2 @ 632.8nm over 25mm area, per imaging optics standard |
| Edge Surface/Chamfer: |
Polished; Chamfer <0.3mmx45deg | |
Optical Substrates
